Hydrogen Peroxide Plasma Sterilization System

The present invention refers to plasma generator power supply electrode and a sterilizable object of different door zone, the car is plasma between the hydrogen peroxide plasma sterilization system relates to, a sterile object placed on the tray is received a sterile chamber; sterilization chamber supplying hydrogen peroxide for supplying hydrogen peroxide as to; sterilization chamber sterilization when exhausting the gas in cavities communicate through exhaust chamber and a vacuum pump; and sterilizing onto the substrate loaded into a chamber is a section for, sterilization chamber are provided, outside of the power source and the, sterilization object sterilization on tray in the interior of the chamber so as to surround the chamber wall and the situated opposite power supply electrode and the small end portion connected to the power source, sterilization a achieved by is grounded the walls of the chamber and an earthing electrode number 1, tray on sterilization object to surround the power supply electrode, a tray is disposed between the earth-reference to connect electrically the shield pad and tray a number 2 having ground electrode includes a plasma generator.