METHOD FOR MANUFACTURING SINTERED ALUMINUM NITRIDE COMPACT
2022-07-31
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PROBLEM TO BE SOLVED : To provide a method for manufacturing a sintered aluminum nitride compact capable of manufacturing the sintered aluminum nitride compact having high thermal conductivity without entailing the degradation in strength and workability accompanying the higher thermal conductivity of the sintered aluminum nitride compact.
SOLUTION : A molding composed of aluminum nitride powder of 0.3 to 3 μm in average particle size, sintering additive powder composed of rare earth compound and/or alkaline earth metal and an organic binder is degreased in such a manner that the amount of residual carbon attains 2, 500 to 10, 000 ppm and thereafter the obtained degreased body is fired for 35 to 100 hours in a neutral atmosphere of 1, 550 to 1, 900°C, thence the obtained sintered compact is fired for 10 to 50 hours in a reducing atmosphere of 1, 550 to 1, 900°C.