METHOD FOR MANUFACTURING RARE EARTH-IRON GARNET-FILM BY LIQUID PHASE EPITAXIAL METHOD
2022-07-31
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PROBLEM TO BE SOLVED : To provide a method for manufacturing a rare earth-iron garnet film by a liquid phase epitaxial method, by which the formation of pits can be suppressed.
SOLUTION : The method for manufacturing the rare earth-iron garnet film by the liquid phase epitaxial method comprises bringing a garnet substrate into contact with a lead oxide-based flux melt in a crucible, in which the components of a rare earth-iron garnet are melted, and then growing the crystal of the rare earth-iron garnet film on the substrate. In the method, after obtaining the lead oxide-based flux melt containing the melted components of the rare earth-iron garnet, the time elapsing before the crystal growth is started from the time when cooling-down from the raw material melting temperature is started is set to be within 2.5 h.