METHOD FOR MANUFACTURING RARE EARTH-IRON GARNET FILM BY LIQUID PHASE EPITAXIAL METHOD
2022-07-31
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PROBLEM TO BE SOLVED : To provide a method for manufacturing a rare earth-iron garnet film by a liquid phase epitaxial method, by which the formation of large pits hard to be removed can be reduced.
SOLUTION : The method for manufacturing the rare earth-iron garnet film by the liquid phase epitaxial method comprises bringing a garnet substrate into contact with a melt, obtained by melting the components of a rare earth-iron garnet in a lead oxide-based flux, and then growing the crystal of the rare earth-iron garnet film on the substrate while rotating the substrate on the melt surface. In the method, the rotation direction of the substrate is periodically inversed, and the inversion period is 5-30 sec.