ARTICLE COMPRISING SILICON SUBSTRATE AND BOND LAYER
2022-07-31
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PROBLEM TO BE SOLVED : To provide a bond coat not injurious to the mechanical properties of a silicon substrate.
SOLUTION : The bond layer for a silicon substrate contains a metal which forms a heat-resistant oxide having a thickness of about 0.1 to 20 μm. The metals which form the heat-resistant oxides include chromium, tantalum, niobium, silicon, platinum, hafnium, yttrium, aluminum, zirconium, titanium, a rare earth metal, an alkaline earth metal, and a mixture thereof.