GROUP 3 METAL PRECUSOR AND THIN FILM CONTAINING METAL

2022-05-31 4910 477K 0
The present invention provides a structure in which n cyclopentadienyl (Cp) ligand and m linear imine ligand (1≤ n ≤ 2, 1≤ m ≤ 2, n + m = 3) are coordinated to the central metal, characterized in that the central metal is a rare earth element or ruthenium (Lu) Group 3 metal precursor and thereby has the effect of providing a metal-containing thin film.


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