REFLECTION ELECTRODE AND AL ALLOY SPUTTERING TARGET
2022-06-06
1880
680K
0
The purpose of the present invention is to provide, to an element such as an organic EL display or an organic EL illumination, a reflection electrode having a high reflectivity while a driving voltage therefor is sufficiently reduced. The present invention pertains to a reflection electrode which is formed of a transparent conductive film and a reflection film made of an Al alloy and which is characterized in that : a main surface of the reflection film is in contact with a main surface of the transparent conductive film; and the Al alloy contains Zn and a rare earth element such that the ratio of Zn is 3-12 atom% and the ratio of the rare earth element is 0.01-0.5 atom%.