REFLECTION ELECTRODE AND Al ALLOY SPUTTERING TARGET
2022-06-06
3260
58K
0
PROBLEM TO BE SOLVED : To provide a reflection electrode which sufficiently reduces the driving voltage of an element of an organic EL display, an organic EL lighting, or the like and has high reflectance.
SOLUTION : The reflection electrode comprising a reflection film made of an Al alloy and a transparent conductive film is configured such that : a main surface of the Al alloy of the reflection film and a main surface of the transparent conductive film are in contact with each other; and the Al alloy contains Zn at a ratio of 3-12 atom% and contains a rare earth element at a ratio of 0.01-0.5 atom%.
SELECTED DRAWING : None
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