稀土类薄膜磁石及其制造方法

A rare earth thin film magnet which contains Nd, Fe and B as essential components, and which is characterized in that : an Nd-Fe-B base film having a composition in which the Nd content is higher than that of the stoichiometric composition is formed on an Si substrate that is provided with an oxide film on the surface; and a film (a nano composite film) having a structure in which [alpha]-Fe phases and Nd2Fe14B are alternately arranged and three-dimensionally dispersed is provided on the base film. The objective of the present invention is to provide a rare earth thin film magnet which has good magnetic characteristics, while being less susceptible to the occurrence of film separation or substrate breakage.