Thin-film rare-earth magnets and manufacturing method thereof

Nd, Fe, B rare earth magnet essentially thin film, an oxide film formed on the Si substrate surface is much Nd content than the stoichiometric composition of the underlying film with Nd d Fe d B, α-to-Fe phase Nd on base film2 Fe14 B alternately arranged, and a 3 dimensional structure (nanocomposite film) having a film dispersed on the rare earth magnet is provided with a thin film. A substrate reduces the occurrence of peeling or breakage, with a rare earth magnet and a thin and good magnetic properties. Figure 1 [drawing]