Thin permanent-magnet film and process for producing the same

Refractory metal layers2, 4, 6, 8, and10, and rare earth alloy magnetic layers3, 5, 7, 9, 11, and12are alternately deposited, so as to form a multilayer structure including four or more layers on a substrate. The refractory metal layers2, 4, 6, 8, and10are formed from at least one kind of material selected from a group consisting of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W, and each has a thickness of not less than 5 nm nor more than 50 nm. The rare earth alloy magnetic layers3, 5, 7, 9, 11, and12have tetragonal R2Fe14B (R is Nd and/or Pr) as a primary constituent phase, and each has a thickness of not less than 50 nm nor more than 500 nm.